Ultra-high purity diaphragm valves for atomic layer deposition and fast actuation applications.
Unit of Measure
Items
UFS204VFLC_Enlarge

UF Series - Ultra Fast, Actuated 2 Port Surface Mount UCV, Standard Bonnet

UFS304VFLC_Enlarge

UF Series - Ultra Fast, Actuated 2 Port Surface Mount UCV, Standard Bonnet

UFS204VFLCX_Enlarge

UF Series - Ultra Fast, Actuated 2 Port Surface Mount UCV, Extended Bonnet

UFS304VFLCX_Enlarge

UF Series - Ultra Fast, Actuated 3 Port Surface Mount UCV, Extended Bonnet

UFS304VFLCF_Enlarge

UF Series - Ultra Fast, Actuated 3 Port Surface Mount UCV, Extended Bonnet with Fin
Body Size N/A 1/4”
Max Pressure N/A 10 bar150 psi
CV N/A 0.25
Max Working Pressure N/A 1 MPa150 psi
Body Material N/A St.St. 316L Var or Vim/Var
Dimensional Drawing N/A
UFS204VFLC_Tech1
N/A
UFS304VFLC_Tech1
N/A
UFS204VFLCX_Tech1
N/A
UFS304VFLCX_Tech1
N/A
UFS304VFLCF_Tech1
A N/A 0.303 in7.7 mm
A1 N/A
B N/A 0.26 in6.6 mm
C N/A 1.12 in28.4 mm
D N/A 0.173 in4.4 mm
E N/A 0.854 in21.7 mm
F N/A N/A 0.303 in7.7 mm N/A N/A 0.303 in7.7 mm N/A 0.303 in7.7 mm
G N/A 3.33 in84.6 mm N/A 3.33 in84.6 mm N/A N/A N/A
H N/A N/A N/A 4.25 in108.1 mm N/A N/A 4.25 in108.1 mm
J N/A 1.1 in28 mm
Bonnet Type N/A Standard N/A Standard N/A Extended N/A Extended N/A Extended with Fin
Temperature Range N/A 14ºF - 248ºF (-10ºC - 120ºC) N/A 14ºF - 248ºF (-10ºC - 120ºC) N/A 14ºF - 392ºF (-10ºC - 200ºC) N/A 14ºF - 392ºF (-10ºC - 200ºC) N/A 15ºF - 392ºF (-10ºC - 200ºC)
Leak Rate - Across Seat N/A ≤ 1·10-9 atm · cc/sec (He)
Leak Rate - Inboard N/A ≤ 3·10-11 atm · cc/sec (He)
Actuation N/A Actuator, 150 psi, NC
Valve Type N/A 2 Port N/A 3 Port N/A 2 Port N/A 3 Port N/A 3 Port