Request Information
Ultra-high purity diaphragm valves for atomic layer deposition and fast actuation applications.
Unit of Measure

Technical Specs

Type

 N/A Surface Mount

Body Size

 N/A 1/4”

Max Pressure

 N/A 10 bar150 psi

CV

 N/A 0.25

Max Working Pressure

 N/A 1 MPa150 psi

Body Material

 N/A St.St. 316L Var or Vim/Var

Bonnet Type

 N/A Extended

Temperature Range

 N/A 14ºF - 392ºF (-10ºC - 200ºC)

Leak Rate - Across Seat

 N/A <= 1·10-9 atm · cc/sec (He)

Leak Rate - Inboard

 N/A <= 3·10-11 atm · cc/sec (He)

Actuation

 N/A Actuator, 150 psi, NC

Valve Type

 N/A 3 Port

Dimensions


UFS304VFLCX_Tech1

A

 N/A 0.303 in7.7 mm

B

 N/A 0.26 in6.6 mm

C

 N/A 1.12 in28.4 mm

D

 N/A 0.173 in4.4 mm

E

 N/A 0.854 in21.7 mm

F

 N/A 0.303 in7.7 mm

J

 N/A 1.1 in28 mm