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Ultra-high purity diaphragm valves for atomic layer deposition and fast actuation applications.
Unit of Measure

Technical Specs

Type

 N/A 3 Port Valves

Connection Size

 N/A 1/4”

Connection Type

 N/A swivel Male Face Seal

Body Size

 N/A 1/4”

CV

 N/A 0.25

Max Working Pressure

 N/A 1 MPa150 psi

Body Material

 N/A St.St. 316L Var or Vim/Var

Bonnet Type

 N/A Standard

Temperature Range

 N/A 14ºF - 248ºF (-10ºC - 120ºC)

Leak Rate - Across Seat

 N/A <= 1·10-9 atm · cc/sec (He)

Leak Rate - Inboard

 N/A <= 3·10-11 atm · cc/sec (He)

Actuation

 N/A Actuator, 150 psi, NC

Flow Designation

 N/A Scheme 4

Dimensions


UF344VFLCGM4_Tech1

A

 N/A 2.78 in70.6 mm

B

 N/A 0.43 in11 mm

C

 N/A 1.16 in29.4 mm

D

 N/A 1.16 in29.4 mm

E

 N/A 1 in25.4 mm

F

 N/A 1.39 in35.3 mm

G

 N/A 3.69 in93.8 mm

J

 N/A 1.1 in28 mm