Ultra-high purity diaphragm valves for atomic layer deposition and fast actuation applications.
Unit of Measure

Technical Specs

Type

 2 Port Valves

Connection Size

 1/4”

Connection Type

 swivel Male Face Seal

Body Size

 1/4”

CV

 0.25

Max Working Pressure

 1 MPa150 psi

Body Material

 St.St. 316L Var or Vim/Var

Bonnet Type

 Extended

Temperature Range

 14ºF - 392ºF (-10ºC - 200ºC)

Leak Rate - Across Seat

 <= 1·10-9 atm · cc/sec (He)

Leak Rate - Inboard

 <= 3·10-11 atm · cc/sec (He)

Actuation

 Actuator, 150 psi, NC

Flow Designation

 Scheme 0

Heating Option

 None

Dimensions


UF204VFLCGM4X_Tech1

A

 2.78 in70.6 mm

B

 0.43 in11 mm

C

 1.16 in29.4 mm

D

 1.16 in29.4 mm

E

 1 in25.4 mm

H

 4.62 in117.3 mm

J

 1.1 in28 mm