Ultra-high purity diaphragm valves for atomic layer deposition and fast actuation applications.
Unit of Measure

Technical Specs

Type

N/A 2 Port Valves

Connection Size

N/A 1/4”

Connection Type

N/A swivel Female Face Seal

Body Size

N/A 1/4”

CV

N/A 0.25

Max Working Pressure

N/A 1 MPa150 psi

Body Material

N/A St.St. 316L Var or Vim/Var

Bonnet Type

N/A Extended with Fin

Temperature Range

N/A 17ºF - 392ºF (-10ºC - 200ºC)

Leak Rate - Across Seat

N/A <= 1·10-9 atm · cc/sec (He)

Leak Rate - Inboard

N/A <= 3·10-11 atm · cc/sec (He)

Actuation

N/A Actuator, 150 psi, NC

Flow Designation

N/A Scheme 0

Heating Option

N/A Holes for Thermocouple & Heater

Dimensions


UF204VFLCGF4FH_Tech1

A

N/A 2.78 in70.6 mm

B

N/A 0.43 in11 mm

C

N/A 1.16 in29.4 mm

D

N/A 1.16 in29.4 mm

E

N/A 1 in25.4 mm

H

N/A 4.62 in117.3 mm

J

N/A 1.1 in28 mm